{"id":3287,"date":"2022-06-18T13:30:38","date_gmt":"2022-06-18T05:30:38","guid":{"rendered":"https:\/\/bjgrish.com\/%e5%a4%96%e5%bb%b6%e7%89%87\/"},"modified":"2023-06-25T00:11:29","modified_gmt":"2023-06-24T16:11:29","slug":"waiyanpian","status":"publish","type":"post","link":"https:\/\/bjgrish.com\/waiyanpian\/","title":{"rendered":"\u5916\u5ef6\u7247"},"content":{"rendered":"

\u5916\u5ef6\u7247<\/span><\/strong><\/p>\n

\u5916\u5ef6\u7247(EPI)\u6307\u7684\u662f\u5728\u886c\u5e95\u4e0a\u751f\u957f\u51fa\u7684\u534a\u5bfc\u4f53\u8584\u819c\uff0c\u8584\u819c\u4e3b\u8981\u7531P\u578b\uff0c\u91cf\u5b50\u9631\uff0cN\u578b\u4e09\u4e2a\u90e8\u5206\u6784\u6210\u3002\u73b0\u5728\u4e3b\u6d41\u7684\u5916\u5ef6\u6750\u6599\u662f\u6c2e\u5316\u9553(GaN)\uff0c\u886c\u5e95\u6750\u6599\u4e3b\u8981\u6709\u84dd\u5b9d\u77f3\u3002\u7845\uff0c\u78b3\u5316\u5728\u4e09\u79cd\uff0c\u91cf\u5b50\u9631\u822c\u4e3a5\u4e2a\u901a\u5e38\u7528\u7684\u751f\u4ea7\u5de5\u827a\u4e3a\u91d1\u5c5e\u6709\u673a\u7269\u6c14\u76f8\u5916\u5ef6(MOCVD)\uff0c\u8fd9\u662fLED\u4ea7\u4e1a\u7684\u6838\u5fc3\u90e8\u5206\uff0c\u9700\u8981\u8f83\u9ad8\u7684\u6280\u672f\u4ee5\u53ca\u8f83\u5927\u7684\u8d44\u91d1\u6295\u5165\u3002<\/span><\/p>\n

\u76ee\u524d\u5728\u7845\u886c\u5e95\u4e0a\u53ef\u4ee5\u505a\u666e\u901a\u5916\u5ef6\u5c42\uff0c\u591a\u5c42\u7ed3\u6784\u5916\u5ef6\u5c42\uff0c\u8d85\u9ad8\u963b\u5916\u5ef6\u5c42\uff0c\u8d85\u539a\u5916\u5ef6\u5c42\uff0c\u5916\u5ef6\u5c42\u7535\u963b\u7387\u53ef\u8fbe\u4e00\u5343\u6b27\u59c6\u4ee5\u4e0a\uff0c\u5bfc\u7535\u7c7b\u578b\u4e3a\uff1aP\/P++, N\/N++, N\/N+, N\/N+\/N++, N\/P\/P, P\/N\/N+\u7b49\u591a\u79cd\u7c7b\u578b\u3002<\/span><\/p>\n

\u7845\u5916\u5ef6\u6676\u7247\u662f\u7528\u4e8e\u5236\u9020\u5e7f\u6cdb\u7684\u534a\u5bfc\u4f53\u5668\u4ef6\u7684\u6838\u5fc3\u6750\u6599\uff0c\u5728\u6d88\u8d39\u3001\u5de5\u4e1a\u3001\u519b\u4e8b\u548c\u7a7a\u95f4\u7535\u5b50\u5b66\u4e2d\u90fd\u6709\u5e94\u7528\u3002<\/span><\/p>\n


<\/span><\/p>\n

<\/span><\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u76f4\u5f84<\/span><\/td>\n4″ <\/span><\/td>\n5″ <\/span><\/td>\n6″ <\/span><\/td>\n8″ <\/span><\/td>\n<\/tr>\n
\u5916\u5ef6\u5c42<\/span><\/td>\n\u63ba\u6742<\/span><\/td>\nBoron, Phos, Arsenic<\/span><\/td>\n<\/tr>\n
<\/td>\n\u6676\u5411<\/span><\/td>\n<100>, <111><\/span><\/td>\n<\/tr>\n
<\/td>\n\u5bfc\u7535\u7c7b\u578b<\/span><\/td>\nP\/P++, N\/N++, N\/N+, N\/N+\/N++, N\/P\/P, P\/N\/N+<\/span><\/td>\n<\/tr>\n
<\/td>\n\u7535\u963b\u7387<\/span><\/td>\n0.001-50 Ohm-cm<\/span><\/td>\n<\/tr>\n
<\/td>\n\u7535\u963b\u7387\u5747\u5300\u6027<\/span><\/td>\nStandard<6%, Maximum Capabilities <2%<\/span><\/td>\n<\/tr>\n
<\/td>\n\u5916\u5ef6\u5c42\u539a\u5ea6 (um)<\/span><\/td>\n0.1-100<\/span><\/td>\n<\/tr>\n
<\/td>\n\u539a\u5ea6\u5747\u5300\u6027<\/span><\/td>\nStandard<3%, Maximum Capabilities <1%<\/span><\/td>\n<\/tr>\n
\u886c\u5e95<\/span><\/td>\n\u6676\u5411<\/span><\/td>\n<100>, <111><\/span><\/td>\n<\/tr>\n
<\/td>\n\u5bfc\u7535\u7c7b\u578b\/\u63ba\u6742\u5143\u7d20<\/span><\/td>\nP Type\/Boron , N Type\/Phos,  N Type\/As, N Type\/Sb<\/span><\/td>\n<\/tr>\n
<\/td>\n\u539a\u5ea6 (um)<\/span><\/td>\n300-725<\/span><\/td>\n<\/tr>\n
<\/td>\n\u7535\u963b\u7387<\/span><\/td>\n0.001-100 Ohm-cm<\/span><\/td>\n<\/tr>\n
<\/td>\n\u8868\u9762\u72b6\u6001<\/span><\/td>\nP\/P, P\/E<\/span><\/td>\n<\/tr>\n
<\/td>\n\u9897\u7c92\u5ea6<\/span><\/td>\n<30@.0.5um<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n


 <\/p>\n\n\n\n
\"\"<\/span><\/td>\n\"\"<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

 <\/p>\n

\u4e00\u4e9b\u6700\u91cd\u8981\u7684\u5fae\u7535\u5b50\u5e94\u7528\u4e86\u591a\u79cd\u751f\u4ea7\u8bc1\u660e\u548c\u884c\u4e1a\u6807\u51c6\u7684\u7845\u5916\u5ef6\u5de5\u827a\u6280\u672f\uff1a<\/span><\/div>\n
\u4e8c\u6781\u7ba1<\/span><\/div>\n
\u2022\u8096\u7279\u57fa\u4e8c\u6781\u7ba1<\/span><\/div>\n
\u2022\u8d85\u5feb\u4e8c\u6781\u7ba1<\/span><\/div>\n
\u2022\u9f50\u7eb3\u4e8c\u6781\u7ba1<\/span><\/div>\n
\u2022PIN\u4e8c\u6781\u7ba1<\/span><\/div>\n
\u2022\u77ac\u6001\u7535\u538b\u6291\u5236\u5668\uff08TVS\uff09<\/span><\/div>\n
\u2022\u548c\u5176\u4ed6<\/span><\/div>\n

\u6676\u4f53\u7ba1<\/span><\/div>\n
\u2022\u529f\u7387IGBT<\/span><\/div>\n
\u2022\u52a8\u529bDMO<\/span><\/div>\n
\u2022MOSFET<\/span><\/div>\n
\u2022\u4e2d\u7b49\u529f\u7387<\/span><\/div>\n
\u2022\u5c0f\u4fe1\u53f7<\/span><\/div>\n
\u2022\u548c\u5176\u4ed6<\/span><\/div>\n

\u96c6\u6210\u7535\u8def<\/span><\/div>\n
\u53cc\u6781\u96c6\u6210\u7535\u8def<\/span><\/div>\n
\u2022EEPROM<\/span><\/div>\n
\u2022\u653e\u5927\u5668<\/span><\/div>\n
\u2022\u5fae\u5904\u7406\u5668<\/span><\/div>\n
\u2022\u5fae\u63a7\u5236\u5668<\/span><\/div>\n
\u2022\u5c04\u9891\u8bc6\u522b<\/span><\/div>\n
\u2022\u548c\u5176\u4ed6<\/span><\/div>\n

 <\/span><\/p>\n

       \u5bf9\u4e8e\u96c6\u6210\u7535\u8def\u5236\u9020\u5546\u7845\u5cf0\u63d0\u4f9b\u5728\u886c\u5e95\u4e0a\u5177\u6709\u57cb\u5165\u79bb\u5b50\u6ce8\u5165\u6216\u6269\u6563\u5c42\u7684\u7845\u5916\u5ef6\u6c89\u79ef\u670d\u52a1\u3002<\/span><\/div>\n
       \u6839\u636e\u751f\u957f\u65b9\u6cd5\u53ef\u4ee5\u5c06\u5916\u5ef6\u5de5\u827a\u5206\u4e3a\u4e24\u5927\u7c7b(\u88681)\uff1a\u5168\u5916\u5ef6(Blanket Epi)\u548c\u9009\u62e9\u6027\u5916\u5ef6(Selective Epi, \u7b80\u79f0SEG)\u3002\u5de5\u827a\u6c14\u4f53\u4e2d\u5e38\u7528\u4e09\u79cd\u542b\u7845\u6c14\u4f53\u6e90\uff1a\u7845\u70f7(SiH4)\uff0c\u4e8c\u6c2f\u7845\u70f7(SiH2Cl2, \u7b80\u79f0DCS) \u548c\u4e09\u6c2f\u7845\u70f7(SiHCl3, \u7b80\u79f0TCS)\uff1b\u67d0\u4e9b\u7279\u6b8a\u5916\u5ef6\u5de5\u827a\u4e2d\u8fd8\u8981\u7528\u5230\u542bGe\u548cC\u7684\u6c14\u4f53\u9517\u70f7(GeH4)\u548c\u7532\u57fa\u7845\u70f7(SiH3CH3)\uff1b\u9009\u62e9\u6027\u5916\u5ef6\u5de5\u827a\u4e2d\u8fd8\u9700\u8981\u7528\u5230\u523b\u8680\u6027\u6c14\u4f53\u6c2f\u5316\u6c22(HCl)\uff0c\u53cd\u5e94\u4e2d\u7684\u8f7d\u6c14\u4e00\u822c\u9009\u7528\u6c22\u6c14(H2)\u3002” ~1 X. i9 V% A7 I<\/span><\/span><\/div>\n

 <\/span><\/p>\n

       \u5916\u5ef6\u9009\u62e9\u6027\u7684\u5b9e\u73b0\u4e00\u822c\u901a\u8fc7\u8c03\u8282\u5916\u5ef6\u6c89\u79ef\u548c\u539f\u4f4d(in-situ)\u523b\u8680\u7684\u76f8\u5bf9\u901f\u7387\u5927\u5c0f\u6765\u5b9e\u73b0\uff0c\u6240\u7528\u6c14\u4f53\u4e00\u822c\u4e3a\u542b\u6c2f(Cl)\u7684\u7845\u6e90\u6c14\u4f53DCS\uff0c\u5229\u7528\u53cd\u5e94\u4e2dCl\u539f\u5b50\u5728\u7845\u8868\u9762\u7684\u5438\u9644\u5c0f\u4e8e\u6c27\u5316\u7269\u6216\u8005\u6c2e\u5316\u7269\u6765\u5b9e\u73b0\u5916\u5ef6\u751f\u957f\u7684\u9009\u62e9\u6027\uff1b\u7531\u4e8eSiH4\u4e0d\u542bCl\u539f\u5b50\u800c\u4e14\u6d3b\u5316\u80fd\u4f4e\uff0c\u4e00\u822c\u4ec5\u5e94\u7528\u4e8e\u4f4e\u6e29\u5168\u5916\u5ef6\u5de5\u827a\uff1b\u800c\u53e6\u5916\u4e00\u79cd\u5e38\u7528\u7845\u6e90TCS\u84b8\u6c14\u538b\u4f4e\uff0c\u5728\u5e38\u6e29\u4e0b\u5448\u6db2\u6001\uff0c\u9700\u8981\u901a\u8fc7H2\u9f13\u6ce1\u6765\u5bfc\u5165\u53cd\u5e94\u8154\uff0c\u4f46\u4ef7\u683c\u76f8\u5bf9\u4fbf\u5b9c\uff0c\u5e38\u5229\u7528\u5176\u5feb\u901f\u7684\u751f\u957f\u7387\uff08\u53ef\u8fbe\u52305 um\/min\uff09\u6765\u751f\u957f\u6bd4\u8f83\u539a\u7684\u7845\u5916\u5ef6\u5c42\uff0c\u8fd9\u5728\u7845\u5916\u5ef6\u7247\u751f\u4ea7\u4e2d\u5f97\u5230\u4e86\u5e7f\u6cdb\u7684\u5e94\u7528\u3002IV\u65cf\u5143\u7d20\u4e2dGe\u7684\u6676\u683c\u5e38\u6570(5.646A\u4e0eSi\u7684\u6676\u683c\u5e38\u6570(5.431A\u5dee\u522b\u6700\u5c0f\uff0c\u8fd9\u4f7f\u5f97SiGe\u4e0eSi\u5de5\u827a\u6613\u96c6\u6210\u3002\u5728\u5355\u6676Si\u4e2d\u5f15\u5165Ge\u5f62\u6210\u7684SiGe\u5355\u6676\u5c42\u53ef\u4ee5\u964d\u4f4e\u5e26\u9699\u5bbd\u5ea6\uff0c\u589e\u5927\u6676\u4f53\u7ba1\u7684\u7279\u5f81\u622a\u6b62\u9891\u7387fT(cut-off frequency)\uff0c\u8fd9\u4f7f\u5f97\u5b83\u5728\u65e0\u7ebf\u53ca\u5149\u901a\u4fe1\u9ad8\u9891\u5668\u4ef6\u65b9\u9762\u5e94\u7528\u5341\u5206\u5e7f\u6cdb\uff1b\u53e6\u5916\u5728\u5148\u8fdb\u7684CMOS\u96c6\u6210\u7535\u8def\u5de5\u827a\u4e2d\u8fd8\u4f1a\u5229\u7528Ge\u8ddfSi\u7684\u6676\u683c\u5e38\u6570\u5931\u914d(4%)\u5f15\u5165\u7684\u6676\u683c\u5e94\u529b\u6765\u63d0\u9ad8\u7535\u5b50\u6216\u8005\u7a7a\u7a74\u7684\u8fc1\u79fb\u7387(mobility)\uff0c\u4ece\u800c\u589e\u5927\u5668\u4ef6\u7684\u5de5\u4f5c\u9971\u548c\u7535\u6d41\u4ee5\u53ca\u54cd\u5e94\u901f\u5ea6\uff0c\u8fd9\u6b63\u6210\u4e3a\u5404\u56fd\u534a\u5bfc\u4f53\u96c6\u6210\u7535\u8def\u5de5\u827a\u7814\u7a76\u4e2d\u7684\u70ed\u70b9\u3002<\/span><\/div>\n

 <\/span><\/p>\n

       \u7531\u4e8e\u672c\u5f81\u7845\u7684\u5bfc\u7535\u6027\u80fd\u5f88\u5dee\uff0c\u5176\u7535\u963b\u7387\u4e00\u822c\u5728200ohm-cm\u4ee5\u4e0a\uff0c\u901a\u5e38\u5728\u5916\u5ef6\u751f\u957f\u7684\u540c\u65f6\u8fd8\u9700\u8981\u63ba\u5165\u6742\u8d28\u6c14\u4f53(dopant)\u6765\u6ee1\u8db3\u4e00\u5b9a\u7684\u5668\u4ef6\u7535\u5b66\u6027\u80fd\u3002\u6742\u8d28\u6c14\u4f53\u53ef\u4ee5\u5206\u4e3aN\u578b\u548cP\u578b\u4e24\u7c7b\uff1a\u5e38\u7528N\u578b\u6742\u8d28\u6c14\u4f53\u5305\u62ec\u78f7\u70f7(PH3)\u548c\u7837\u70f7(AsH3)\uff0c\u800cP\u578b\u5219\u4e3b\u8981\u662f\u787c\u70f7(B2H6)\u3002<\/span><\/div>\n

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