{"id":2877,"date":"2023-05-24T22:45:17","date_gmt":"2023-05-24T14:45:17","guid":{"rendered":"https:\/\/bjgrish.com\/?p=2877"},"modified":"2023-06-25T00:08:19","modified_gmt":"2023-06-24T16:08:19","slug":"linhuayinxinpianpaoguangye","status":"publish","type":"post","link":"https:\/\/bjgrish.com\/linhuayinxinpianpaoguangye\/","title":{"rendered":"\u78f7\u5316\u94df\u82af\u7247\u629b\u5149\u6db2"},"content":{"rendered":"\n
\u78f7\u5316\u94df ( InP) \u662f\u91cd\u8981\u7684\u2162-\u2164\u65cf\u5316\u5408\u7269\u534a\u5bfc\u4f53\u6750\u6599\uff0c\u78f7\u5316\u94df\u5177\u6709\u76f4\u63a5\u8dc3\u8fc1\u578b\u80fd\u5e26\u7ed3\u6784\uff0c\u7981\u5e26\u5bbd\u5ea6\u8f83\u5bbd\uff0c\u78f7\u5316\u94df\u6676\u4f53\u6750\u6599\u5177\u6709\u9ad8\u7684\u7535\u573a\u6f02\u79fb\u901f\u5ea6\u3001\u826f\u597d\u7684\u70ed\u5bfc\u7279\u6027\u548c\u8f83\u5f3a\u7684\u6297\u8f90\u5c04\u80fd\u529b\u7b49\u4f18\u70b9\uff0c\u9002\u5408\u4e8e\u5236\u9020\u9ad8\u9891\u3001\u9ad8\u901f\u548c\u4f4e\u529f\u8017\u5fae\u6ce2\u5668\u4ef6\u548c\u7535\u8def\uff0c\u5728\u5149\u7ea4\u901a\u8baf\u9886\u57df\uff0c\u78f7\u5316\u94df\u4e5f\u662f\u9996\u9009\u7684\u901a\u8baf\u6750\u6599\uff0c\u5e94\u7528\u4e8e\u592a\u9633\u80fd\u7535\u6c60\u65f6\uff0c\u5177\u6709\u8f83\u9ad8\u7684\u8f6c\u6362\u901f\u7387\uff0c\u6297\u8f90\u5c04\u80fd\u529b\u4f18\u4e8e Si \u548cGaAs \u7b49\u534a\u5bfc\u4f53\u6750\u6599\uff0c\u800c\u4e14\u5de5\u4f5c\u6e29\u5ea6\u9ad8 ( 675\uff5e725 K)\uff0c\u975e\u5e38\u9002\u5b9c\u7528\u4f5c\u4eba\u9020\u536b\u661f\u7684\u592a\u9633\u80fd\u7535\u6c60\u6750\u6599\u3002\u53e6\u5916\uff0c\u78f7\u5316\u94df\u5177\u6709\u8f83\u9ad8\u7684\u7535\u5b50\u8fc1\u79fb\u901f\u7387\u548c\u826f\u597d\u7684\u5149\u5b66\u6027\u80fd\uff0c\u53ef\u4f5c\u4e3a\u886c\u5e95\u6750\u6599\u5236\u4f5c\u5149\u7535\u5668\u4ef6\u3001\u5149\u7535\u96c6\u6210\u7535\u8def\u3002<\/p>\n\n\n\n
\u78f7\u5316\u94df\u4f5c\u4e3a\u534a\u5bfc\u4f53\u886c\u5e95\uff0c\u9700\u8981\u7ecf\u8fc7\u5355\u6676\u751f\u957f\u3001\u5207\u7247\u3001\u5916\u5706\u5012\u89d2\u3001\u7814\u78e8\u3001\u629b\u5149\u53ca\u6e05\u6d17\u7b49\u5de5\u827a\u8fc7\u7a0b\u3002\u7531\u4e8e\u78f7\u5316\u94df\u786c\u5ea6\u5c0f\u3001\u8d28\u5730\u8f6f\u8106\uff0c\u5728\u952f\u5207\u53ca\u7814\u78e8\u52a0\u5de5\u5de5\u827a\u4e2d\uff0c\u6676\u7247\u8868\u9762\u5bb9\u6613\u4ea7\u751f\u8868\u9762\/\u4e9a\u8868\u9762\u635f\u4f24\u5c42\uff0c\u9700\u8981\u901a\u8fc7\u6700\u7ec8\u7684\u629b\u5149\u5de5\u827a\u53bb\u9664\u8868\u9762\/\u4e9a\u8868\u9762\u635f\u4f24\u3001\u51cf\u5c11\u4f4d\u9519\u5bc6\u5ea6\u5e76\u964d\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\u3002\u629b\u5149\u662f\u6676\u7247\u8868\u9762\u52a0\u5de5\u7684\u6700\u540e\u4e00\u9053\u5de5\u5e8f\uff0c\u76ee\u7684\u662f\u964d\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\uff0c\u83b7\u5f97\u65e0\u635f\u4f24\u7684\u5149\u6ed1\u8868\u9762\u3002\u5e38\u89c1\u7684\u629b\u5149\u65b9\u6cd5\u6709\u673a\u68b0\u629b\u5149\u3001\u5316\u5b66\u673a\u68b0\u629b\u5149 ( CMP) \u3001\u78c1\u6d41\u53d8\u629b\u5149\u3001\u5f39\u6027\u53d1\u5c04\u629b\u5149\u3001\u52a8\u538b\u6d6e\u79bb\u629b\u5149\u3001\u6d6e\u6cd5\u629b\u5149\u3001\u4f4e\u6e29\u629b\u5149\u7b49\u3002\u5bf9\u4e8e\u78f7\u5316\u94df\u6750\u6599\uff0c\u76ee\u524d\u4e3b\u8981\u91c7\u7528 CMP \u65b9\u6cd5\u8fdb\u884c\u629b\u5149\u3002<\/p>\n\n\n\n
\u629b\u5149\u7247\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\u3001\u6676\u683c\u5b8c\u6574\u6027\u76f4\u63a5\u5f71\u54cd\u8584\u819c\u5c42\u7684\u539f\u5b50\u6392\u5217\u65b9\u5f0f\uff0c\u8981\u6c42\u629b\u5149\u7247\u8868\u9762\u5177\u6709\u6781\u9ad8\u7684\u6676\u683c\u5b8c\u6574\u6027\u548c\u4f4e\u7c97\u7cd9\u5ea6\u3002\u4e3a\u6ee1\u8db3\u5668\u4ef6\u6027\u80fd\u53ca\u5916\u5ef6\u5de5\u827a\u7684\u9700\u8981\uff0c\u4e00\u822c\u8981\u6c42\u629b\u5149\u7247\u8868\u9762\u7c97\u7cd9\u5ea6\uff1c0.5 nm\u3002\u78f7\u5316\u94df\uff08InP\uff09\u4e0e\u7837\u5316\u9553\uff08GaAs\uff09\u540c\u5c5e\u2162-\u2164\u65cf\u5316\u5408\u7269\uff0c\u4f46\u662f\u5728\u6027\u8d28\u4e0a\u5dee\u522b\u5f88\u5927\uff0c\u76ee\u524d\uff0c\u7837\u5316\u9553\u629b\u5149\u5de5\u827a\u5df2\u7ecf\u975e\u5e38\u6210\u719f\uff0c\u4f46\u662f\u78f7\u5316\u94df\u6750\u6599\u7814\u7a76\u591a\u96c6\u4e2d\u5728\u6676\u4f53\u751f\u957f\u548c\u8868\u9762\u5143\u7d20\u5206\u6790\u4e0a\uff0c\u5bf9\u4e8e\u629b\u5149\u7684\u62a5\u9053\u51e0\u4e4e\u6ca1\u6709\uff0c\u8fd9\u8bf4\u660e\u78f7\u5316\u94df\u5355\u6676\u7247\u7684\u629b\u5149\u548c\u6e05\u6d17\u5de5\u827a\u6280\u672f\u5c1a\u5904\u4e8e\u4fdd\u5bc6\u9636\u6bb5\u3002\u91c7\u7528\u76f8\u540c\u7684\u629b\u5149\u5de5\u827a\uff0c\u7837\u5316\u9553\u6676\u7247\u7684\u7c97\u629b\u901f\u7387\u80fd\u8fbe\u5230\uff080.7\uff5e1.0\uff09\u03bcm\/min\uff0c\u7cbe\u629b\u540e\u8868\u9762\u80fd\u8fbe\u5230\u201c\u514d\u6e05\u6d17\u201d\u7684\u6c34\u5e73\uff1b\u800c\u78f7\u5316\u94df\u6676\u7247\u7684\u7c97\u629b\u901f\u7387\u4ec5\u4e3a\uff080.10\uff5e0.15\uff09\u03bcm\/min\uff0c\u629b\u5149\u540e\u8868\u9762\u72b6\u51b5\u5c1a\u8fbe\u4e0d\u5230\u7837\u5316\u9553\u7c97\u629b\u7247\u6c34\u5e73\uff0c\u4e14\u5212\u4f24\u8f83\u591a\u3002\u56e0\u6b64\uff0c\u4f18\u5316\u89e3\u51b3\u78f7\u5316\u94df\u5355\u6676\u7247\u629b\u5149\u5de5\u827a\u7814\u7a76\u5177\u6709\u975e\u5e38\u91cd\u8981\u7684\u610f\u4e49\u3002<\/p>\n\n\n\n
\u4ee5\u524d\u7684InP\u6676\u7247\u629b\u5149\u5de5\u827a\u4e3b\u8981\u57fa\u4e8e3\u79cd\u629b\u5149\u6db2\uff1a\uff081\uff09Br2<\/sub>-CH3<\/sub>OH\u53ca\u6539\u8fdb\u578b\uff1b\uff082\uff09H3<\/sub>PO4<\/sub>-H2<\/sub>O2<\/sub>-SiO2<\/sub>\u57fa\u629b\u5149\u6db2\uff1b\uff083\uff09CH3<\/sub>COOH-NaCIO-SiO2<\/sub>\u57fa\u629b\u5149\u6db2\u3002\u4f46\u662f\u8fd93\u79cd\u629b\u5149\u6db2\u6709\u7740\u5176\u96be\u4ee5\u514b\u670d\u7684\u7f3a\u9677\u3002<\/p>\n\n\n\n Br2<\/sub>-CH3<\/sub>OH\u53ca\u6539\u8fdb\u578b\uff0c\u867d\u7136Br2<\/sub>-CH3<\/sub>OH\u80fd\u591f\u5236\u5907\u4f4e\u635f\u4f24\u3001\u4f4e\u6cbe\u6c61\u7684InP\u629b\u5149\u6676\u7247\uff0c\u4f46\u5176\u91cd\u590d\u6027\u6781\u5dee\uff0c\u53e6\u5916\u7531\u4e8e\u8fd9\u79cd\u6eb6\u6db2\u7684\u81ea\u8eab\u7279\u70b9\uff1a\u5feb\u901f\u6325\u53d1\u53ca\u6bd2\u6027\u5bfc\u81f4\u4e86\u8fd9\u79cd\u629b\u5149\u6db2\u5bf9\u8bbe\u5907\u53ca\u4eba\u5458\u9020\u6210\u6781\u5927\u7684\u4f24\u5bb3\u3002\u53e6\u5916\u8fd9\u79cd\u629b\u5149\u6db2\u5e94\u8be5\u8bf4\u662f\u91c7\u7528\u7684\u7eaf\u5316\u5b66\u629b\u5149\u800c\u4e0d\u662f\u771f\u6b63\u7684\u5316\u5b66\u673a\u68b0\u629b\u5149\uff0c\u5b83\u5bfc\u81f4\u4e86\u629b\u5149\u6676\u7247\u8868\u9762\u7684\u201c\u6854\u76ae\u201d\u73b0\u8c61\uff0c\u4e3a\u4e86\u514b\u670d\u8fd9\u79cd\u7f3a\u9677\uff0c\u4eba\u4eec\u91c7\u7528\u4e00\u79cd\u6539\u8fdb\u7684\u629b\u5149\u6db2\uff0c\u5373Br2<\/sub>-CH3<\/sub>OH-H2<\/sub>O-SiO2<\/sub>\uff0c\u5b83\u5f15\u8fdb\u4e86SiO2<\/sub>\u7684\u673a\u68b0\u4f5c\u7528\uff0c\u4f46\u662f\u80fd\u591f\u770b\u51fa\u7531\u4e8eH2<\/sub>O\u7684\u5b58\u5728\uff0c\u52a0\u4e0a\u629b\u5149\u7ed3\u675f\u540eBr2<\/sub>\u5bf9\u6676\u7247\u8868\u9762\u7684\u5438\u9644\uff0c\u4f7f\u4e8c\u8005\u5728\u629b\u5149\u9762\u4e0a\u8fdb\u884c\u5316\u5b66\u53cd\u5e94\uff0c\u5bf9\u8868\u9762\u4ea7\u751f\u7834\u574f\uff0c\u8fd9\u4e00\u70b9\u5df2\u88ab\u8fdb\u4e00\u6b65\u8bc1\u5b9e\u3002<\/p>\n\n\n\n H3<\/sub>PO4<\/sub>-H2<\/sub>O2<\/sub>-SiO2<\/sub>\u57fa\u629b\u5149\u6db2\uff0c\u6700\u8fd1\u4e00\u79cd\u65b0\u7684\u629b\u5149\u6db2\u5373H3<\/sub>PO4<\/sub>-H2<\/sub>O2<\/sub>-SiO2<\/sub>\u57fa\u629b\u5149\u6db2\u88ab\u7814\u5236\u6210\u529f\uff0c\u5e76\u6295\u5165\u4f7f\u7528\u3002\u4f46\u662f\u8fd9\u79cd\u629b\u5149\u6db2\u4e5f\u8fd8\u6709\u4e00\u4e9b\u4e0d\u8db3\u4e4b\u5904\uff0c\u7531\u4e8e\u5176\u5448\u9178\u6027(PH<7)\uff0c\u9897\u7c92\u5728\u629b\u5149\u8fc7\u7a0b\u4e2d\u5f62\u6210\u7845\u80f6\uff0c\u9644\u7740\u5728\u629b\u5149\u6676\u7247\u8868\u9762\uff0c\u629b\u5149\u7ed3\u675f\u540e\u5373\u4f7f\u7528\u8d85\u58f0\u6216\u5146\u58f0\u6e05\u6d17\u7b49\u5148\u8fdb\u624b\u6bb5\u4e5f\u4e0d\u6613\u53bb\u9664\u3002\u53ef\u4ee5\u770b\u51fa\u8fd9\u79cd\u7f3a\u9677\u662f\u7531\u5176pH\u503c\u5c0f\u4e8e7\u8fd9\u4e00\u672c\u8d28\u7279\u6027\u6240\u51b3\u5b9a\u7684\u3002<\/p>\n\n\n\n CH3<\/sub>COOH-NaCIO-SiO2<\/sub>\u57fa\u629b\u5149\u6db2\uff0c\u867d\u7136CH3<\/sub>COOH-NaCIO-SiO2<\/sub>\u57fa\u629b\u5149\u6db2\u4e5f\u88ab\u7528\u6765\u629b\u5149InP\u6676\u7247\uff0c\u4f46\u4ecd\u672a\u80fd\u4f7f\u5176pH\u503c\u5927\u4e8e7\uff0c\u6240\u4ee5\u4e0a\u8ff0\u56f0\u96be\u4ecd\u672a\u514b\u670d\uff0c\u53e6\u5916\uff0c\u8fd9\u79cd\u629b\u5149\u6db2\u5bf9\u6e29\u5ea6\u5341\u5206\u654f\u611f\uff0c\u96be\u4e8e\u91cd\u590d\u629b\u5149\uff0c\u629b\u5149\u8fc7\u7a0b\u4e2dCl2<\/sub>\u7684\u91ca\u653e\u5bf9\u629b\u5149\u57ab\u635f\u5bb3\u6781\u5927\uff0c\u5927\u5927\u964d\u4f4e\u4e86\u57ab\u5b50\u7684\u4f7f\u7528\u5bff\u547d\u3002<\/p>\n\n\n\n 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