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\u6c27\u5316\u94dd\u7814\u78e8\u6db2<\/span><\/p>\n <\/span><\/p>\n <\/p>\n CMP\u629b\u5149\u6db2<\/span><\/p>\n <\/p>\n \u805a\u6c28\u916f\u7814\u78e8\u57ab<\/span><\/strong><\/span> <\/span><\/strong><\/span><\/p>\n <\/p>\n \u963b\u5c3c\u5e03\u7cbe\u629b\u57ab<\/span><\/p>\n \u6b22\u8fce\u60a8\u6765\u7535\u54a8\u8be2\u8be6\u60c5\uff01<\/strong><\/span><\/p>\n 010-51653168<\/strong><\/span><\/p>\n \u5173\u4e8e<\/span>\u56fd\u745e\u5347GRISH\u00ae<\/span><\/strong><\/p>\n 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<\/span>\u76ee\u524d\u6c27\u5316\u9553\u4f4e\u7f3a\u9677\u5bc6\u5ea6\u886c\u5e95\u5df2\u7ecf\u53ef\u4ee5\u8fbe\u52304\u82f1\u5bf8\uff0c\u800c\u5728\u6c27\u5316\u9553\u886c\u5e95\u4e0a\u901a\u8fc7MOVPE\u3001MBE\u53caHVPE\u7b49\u539f\u4f4d\u540c\u8d28\u5916\u5ef6\u83b7\u5f97\u7684\u5916\u5ef6\u5c42\u5177\u67090.5 nm\u5de6\u53f3\u7684RMS\u5e73\u6574\u5ea6\u3002\u6c27\u5316\u9553\u6750\u6599\u7684\u5e73\u5747\u51fb\u7a7f\u7535\u573a\u5df2\u7ecf\u8fbe\u52305 MV\/cm\uff0c\u6c34\u5e73\u53ca\u7eb5\u5411\u5782\u76f4\u6c27\u5316\u9553\u8096\u7279\u57fa\u4e8c\u6781\u7ba1\u5206\u522b\u5df2\u7ecf\u53d6\u5f97\u4e86\u8d85\u8fc73 kV\u4ee5\u53ca2.2 kV\u7684\u51fb\u7a7f\u7535\u538b\u3002\u540c\u65f6\uff0c\u8017\u5c3d\/\u589e\u5f3a\u578b\u80cc\u6805MOSFET\u4e5f\u53d6\u5f97\u4e86\u8d85\u8fc71.5\/1 A\/mm\u7684\u8f93\u51fa\u7535\u6d41\u5bc6\u5ea6\u3001\u6c34\u5e73\u53ca\u7eb5\u5411MOSFET\u5728\u622a\u6b62\u72b6\u6001\u4e0b\u4e5f\u5206\u522b\u53d6\u5f97\u4e861.8\/1 kV\u7684\u51fb\u7a7f\u7535\u538b\u4ee5\u53ca\u6c27\u5316\u9553\u9ad8\u9891\u5668\u4ef6\u53d6\u5f97\u4e86ft\/fmax = 5.1\/17.1 GHz\u3002<\/span><\/strong><\/p>\n<\/section>\n
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